| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical module which satisfies three conditions of the suppression of the leakage of waveguide light to a silicon substrate, a mode-field diameter capable of efficient connection with an ordinary single mode fiber and the formation of a single mode condition at the same time. SOLUTION: A perfectly embedded optical waveguide is provided with a silicon substrate 20, an underclad 21 made of quartz laminated on the silicon substrate 20, an overclad 23 laminated on the underclad 21 and a core 22 which is laminated on the underclad 21 and is surrounded by the overclad 23 in three directions of side surfaces and upper surface. Therein, the difference of relative refraction index between the core 22 and the underclad 21 is made larger than that between the core 22 and the overclad 23. COPYRIGHT: (C)2004,JPO |
