FAST-RESPONSE RESISTIVE SENSOR OF EXPLOSIVE CONCENTRATIONS OF HYDROGEN AND METHOD OF ITS USE

摘要

The fast-response resistive sensor of explosive concentrations of hydrogen comprises an insulating substrate (1), a hydrogen sensitive thin-film element (2) applied on the substrate, a heating member (5) for preheating the hydrogen sensitive thin-film element, in which the hydrogen sensitive thin-film element is made of a material including at least palladium and subjected to heat treatment resulting in palladium oxide formation, or of palladium oxide transferring from an oxide state to the metal state by the action of hydrogen. There is also claimed a method of using a resistive sensor of explosive concentrations of hydrogen. The hydrogen sensitive thin-film element is made of a material containing palladium preheated to a temperature exceeding its operating temperature, the heat treatment continued until palladium oxide in a hydrogen sensitive thin-film element is formed, then the temperature is reduced to the operating temperature.