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发明名称	ATOMIC LAYER DEPOSITION METHODS
摘要
申请公布号	AU2003290815(A1)	申请公布日期	2004.06.03
申请号	AU20030290815	申请日期	2003.11.12
申请人	MICRON TECHNOLOGY, INC.	发明人	TRUNG, TRI DOAN;GUY, T. BLALOCK;GURTEJ, S. SANDHU
分类号	C23C16/38;C23C16/40;C23C16/44;C23C16/455;H01L21/285;H01L21/314;H01L21/316;H01L21/768;(IPC1-7):H01L21/00	主分类号	C23C16/38
代理机构		代理人
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