| 发明名称 |
BITLINE STRUCTURE AND METHOD FOR PRODUCTION THEREOF |
| 摘要 |
The invention relates to a bitline structure with a surface bitline (DLx) and a buried bitline (SLx), whereby the buried bitline (SLx) is embodied in a trench with a trench insulation layer (6) and connected to doped regions (10) for contacting, by means of a surface connection layer (12) and a self-aligning junction layer (13) in an upper part region of the trench. |
| 申请公布号 |
WO2004023553(A3) |
申请公布日期 |
2004.06.03 |
| 申请号 |
WO2003DE02676 |
申请日期 |
2003.08.08 |
| 申请人 |
INFINEON TECHNOLOGIES AG;KAKOSCHKE, RONALD;SHUM, DANNY;TEMPEL, GEORG |
发明人 |
KAKOSCHKE, RONALD;SHUM, DANNY;TEMPEL, GEORG |
| 分类号 |
H01L21/28;H01L21/336;H01L21/8247;H01L27/115 |
主分类号 |
H01L21/28 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
