| 摘要 |
PROBLEM TO BE SOLVED: To rapidly realize the observation of a sample at different positions in an optical axis direction and also to prevent it from being influenced by the observation at another position. SOLUTION: The scanning type optical microscope has a plurality of illuminating optical paths, a luminous flux propagation control means 7 arranged at a spot where the different illuminating optical paths are crossed and controlling the propagation of luminous flux, an objective 8 irradiating the sample 10 with illuminating luminous flux, an in-plane direction scanning means 9 scanning an in-plane direction with the illuminating light, a light condensing position control means 25 provided on at least one illuminating optical path and capable of adjusting the condensing position of the illuminating luminous flux after passing through the objective 8 in the optical axis direction with respect to the condensing position of another illuminating luminous flux, optical path branching means 4 and 23 arranged on the respective illuminating optical paths and branching returned light from the sample 10 from the illuminating optical path, and a plurality of light detecting systems 13 and 28 detecting the returned light from the sample 10 branched by the optical path branching means. COPYRIGHT: (C)2004,JPO
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