| 摘要 |
PROBLEM TO BE SOLVED: To provide a multi-freedom fine-positioning device of simpler structure easily positioning with high-precision in multi-axis directions. SOLUTION: A stage 4 supported by a vertically and horizontally movable rotary support mechanism 3 on a base 2 to be vertically and horizontally movable and rotatable on a plane is supported through an oscillation support mechanism 5 which oscillates around a central axis Z through a center of the stage O and perpendicular to the stage. The oscillation support mechanism 5 comprises a first, a second, and a third linear motion actuators 13-15 disposed on the base 2 roughly at every 120°around the central axis Z vertically penetrating the base 2, a support base 6, and the stage 4 at their center O. An oscillating arm 17 is connected to drive shafts 13a-15a of the first to third linear motion actuators 13-15 through a bearing 16 which rotates around a perpendicular axis to the drive shafts 13a-15a, and a tip of the oscillating arm 17 is installed to the support base 6 through a spherical surface bearing 18. At this time, the oscillating arm 17 is held to have a prescribed elevation angle. COPYRIGHT: (C)2004,JPO
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