SCREW MEMBER FASTENING METHOD IN ASSEMBLING FLUID CONTROL DEVICE ASSEMBLING

摘要

PROBLEM TO BE SOLVED: To provide a screw member fastening method for simply and uniformly fastening four screws in assembling a fluid control device. SOLUTION: This screw member fastening method includes: a preliminary fastening step of manually fastening four screw members, respectively; a primary final fastening step of fastening two screw members of four screw members at the same time until each screw member reaches a designated torque by a torque limiter type biaxial fastening tool; a secondary final fastening step of fastening two remaining screw members at the same time until each screw member reaches a designated torque by a torque limiter type biaxial fastening tool; and an increasingly fastening the two screw members fastened in the primary final fastening step at the same time until each screw member reaches designated torque by a torque limiter type biaxial fastening tool. COPYRIGHT: (C)2004,JPO