Optical arrangement used in the production of semiconductor components comprises a lens system arranged behind a mask, and a medium having a specified refractive index lying between the mask and the lens system

摘要

Optical arrangement (11) comprises a lens system (14) arranged behind a mask (13), and a medium having a refractive index (n) of more than 1 lying between the mask and the lens system. An Independent claim is also included for an optical lithographic process using the above optical arrangement.