| 摘要 |
<p>An inert fluid is purified using a low silica zeolite X (LSX) adsorbent to remove nitrogen, oxygen, carbon dioxide, carbon monoxide and hydrocarbon impurities. An inert fluid is purified using a zeolite X adsorbent having a silicon/aluminum ratio of less than or equal to 1.15, especially ca. 1, to remove nitrogen, oxygen, carbon dioxide, carbon monoxide and/or hydrocarbon impurities to a level of less than 10, preferably less than 1 ppb. Preferred Features: Purification is carried out at -187 to -135 degrees C and at 10<5> to 3 x 10<6> Pa pressure. Oxygen impurities may also be eliminated using a second adsorbent selected from porous metal oxides and optionally exchanged clinoptilolite, the first and second adsorbents being located within the same adsorber. The or each adsorbent is regenerated by an inert gas and/or a reducing gas.</p> |
