SEMICONDUCTOR WAFER HAVING IDENTIFICATION TAG, MASK, WAFER CARRIER, MASK CARRIER, ALIGNER USING THEM, AND SEMICONDUCTOR INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor wafer having few limitations in an adhesion part, an identifying means for a mask of an aligner, and the aligner and a semiconductor inspection device capable of identifying them.

SOLUTION: This wafer 1 and the mask 6 are provided with wireless non-contact identification tags 5 and 11, while the aligner 20 and the like is provided with the wireless non-contact identification tag reading means 33 and 34, storage means 21 and 22 for storing identification information stored in the tag and attributes such as a control parameter of the wafer and the like to which the tag is stuck while associating the identification information with the attributes, and collation means 23 and 24 collating the read identification information of the tag read by the reading means to the stored identification information.

COPYRIGHT: (C)2004,JPO