| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a polymer optical waveguide device having a V-groove without producing waste polymer, and to provide a method for manufacturing the polymer optical waveguide device having a V-groove which does not cause the deviation of an optical axis due to attachment of the waste polymer in a short process time. SOLUTION: The optical waveguide device has an optical waveguide comprising a polymer layer on a substrate and the V-groove for mounting an optical fiber connected with the optical waveguide. The method for manufacturing the optical waveguide device comprises a process of disposing the V-groove on the substrate, a process of forming the optical waveguide comprising the polymer layer on the substrate provided with the V-groove, a process of removing the polymer layer on the V-groove region up to the edge surface on the V-groove by means of a reactive ion etching and a process of removing the polymer layer remaining in the V-groove by means of a method selected from a group of ultrasonic vibration, heating or cooling and combinations of them. COPYRIGHT: (C)2004,JPO |
