Electrostatic drive for valve, has two drive electrodes, to which is applicable control voltage, and first fluid chamber, whose wall is partly formed by first mobile

摘要

The electrostatic drive contains first fluid chamber (13a), whose wall is formed partly by mobile adjusting member (8a) and which is coupled to capillary system (14) with one or more capillaries (15) between several drive electrodes (18,19). The chamber is filled with first actuating liquid (16a), penetrating into capillary system. By application of control voltage to drive electrodes, penetration depth into capillary system is adjustable so that liquid volume in chamber is changed and thus position of adjusting member, e.g. valve member, is changed. Independent claims are included for microvalve etc. fitted with invented drive.