| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polishing device and a method that a top ring body can follow smoothly and rapidly a movement (tilting motion) of an upper surface of a turntable and that a turning torque of a top ring driving shaft can be transferred firmly to the top ring body. <P>SOLUTION: The polishing device has a turntable 20 and a top ring body 3, polishes a surface of a polishing object 6 to be a flat and mirror-like surface by putting the polishing object 6 pressed with a specified force and slid between the turntable 20 and the top ring body 3, and is equipped with a surface pressure adjusting means 37 for adjusting surface pressure distribution of a lower surface of the top ring body 3. <P>COPYRIGHT: (C)2004,JPO |
