发明名称 GAS TREATMENT METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a gas treatment method whereby a larger number of chlorine atoms can be treated more simply than a conventionally known method for treating exhaust gases containing chlorine gases. <P>SOLUTION: In the gas treatment method by passing gas containing chlorine atoms in an atmosphere through an aqueous solution kept alkaline, the chlorine atoms contained in the atmosphere are so absorbed in the aqueous solution as to remove the chlorine atoms from the gas. In this case, sulfites represented by a formula of M<SB>x</SB>(SO<SB>3</SB>)<SB>y</SB>(M is an alkali metal or an alkali earth metals; x, y are natural numbers) or the hydrates thereof are added to the aqueous solution. <P>COPYRIGHT: (C)2004,JPO</p>
申请公布号 JP2004158730(A) 申请公布日期 2004.06.03
申请号 JP20020324614 申请日期 2002.11.08
申请人 CANON INC 发明人 KONDO TAKAHARU;KODA YUZO;MORIYAMA KOUICHIROU
分类号 B01D53/68;B01D53/77;C23C16/44;H01L21/205;(IPC1-7):H01L21/205 主分类号 B01D53/68
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