发明名称 DRAWING POSITION CONTROL SYSTEM
摘要 PROBLEM TO BE SOLVED: To solve the problem that gaps and overlap portions are created between a drawing start point and a drawing end point. SOLUTION: The drawing position control system for a drawing apparatus having a circular pattern generator 21 comprises controlling the generator 21 so as to deviate the drawing start position of a circle from the drawing start position of another circle in proximity to the above circle in drawing a plurality of the circles having the same center and different radii by using the generator 21. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004157483(A) 申请公布日期 2004.06.03
申请号 JP20020325550 申请日期 2002.11.08
申请人 RICOH OPT IND CO LTD 发明人 HASE HARUNORI
分类号 G03F7/20;H01L21/027;(IPC1-7):G03F7/20 主分类号 G03F7/20
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