| 摘要 |
PROBLEM TO BE SOLVED: To provide a calibration method for a semiconductor tester capable of reducing costs, simplifying working contents, and shortening working hours. SOLUTION: In a state, where one-to-one correspondence between each of a plurality of drivers and each of a plurality of comparators is achieved, one of the clock signals and strobe signals that correspond in a one-to-one relationship is used as a reference to adjust the other phase, the relative phase difference among clock signals or that among strobe signals is acquired, and the phase of the plurality of clock signals and the plurality of strobe signals is adjusted, based on the relative phase difference. COPYRIGHT: (C)2004,JPO
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