| 摘要 |
PROBLEM TO BE SOLVED: To provide a quantitative analysis method of a micro constituent for eliminating an influence by a fluctuation in collection efficiency of collectors and a necessity of a troublesome pre-process. SOLUTION: In the method for quantitatively analyzing the micro constituent by collecting the micro constituent 6 contained in a liquid or a gas 4 by using the collectors 3 and measuring the collectors 3 by using a surface analysis apparatus 10, the liquid or the gas 4 containing the micro constituent 6 passes through a plurality of the laminated collectors 3, the micro constituent is collected by the collectors, simultaneous equations are created based on a plurality of measurement results obtained when the collectors 3 are respectively measured by the surface analysis apparatus 10, and a concentration of the micro constituent 6 is found by solving the simultaneous equations. COPYRIGHT: (C)2004,JPO
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