| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas permeability measuring device capable of controlling temperature in a chamber and a measurement gas tank without being affected by a heat-resistant temperature in a pressure sensor. SOLUTION: The gas permeability measuring device comprises a chamber 1 consisting of a pair of cells 6, 7 fitting a sample film 10; the measurement gas tank 2 for adding the measurement gas 11 into a primary-side cell 6 of the sample film 10; a vacuum pump 3 for reducing pressure in the secondary-side cell 7 of the sample film 10; and a permeation pressure sensor 4 for measuring pressure in the measurement gas 11 permeating the sample film 10. Additionally, the gas permeability measuring device has a temperature control section 5 for controlling the temperature of the chamber 1 and the measurement gas tank 2 and corrects a measurement pressure by the permeation pressure sensor 4 according to the temperature of the temperature control section 5 and the permeation pressure sensor 4 to obtain permeability in the measurement gas. COPYRIGHT: (C)2004,JPO
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