| 摘要 |
PROBLEM TO BE SOLVED: To provide a linear drive actuator having excellent durability, restricted in generation of dust and appropriate to be used in the vacuum environment. SOLUTION: This linear drive actuator provided with an inside member 1 having a raceway surface 1a in the periphery thereof, an outside member 2 arranged outside the inside member 1 and having a raceway surface 2a facing the raceway surface 1a, and a plurality of rolling bodies 4 arranged between both the raceway surfaces 1a and 2a freely to roll is used in the condition that at least one load of a load and a preload is applied. A diamond-like carbon film is provided in at least one of the raceway surface 2a of the outside member 2 and the rolling bodies 4. COPYRIGHT: (C)2004,JPO
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