发明名称 |
ELECTRIC PROBE SYSTEM |
摘要 |
<p>An electric probe system comprising a hold mechanism (2) for holding a substrate (10) to be inspected, and a probe unit (3) positionable with respect to the hold mechanism (2), the probe unit (3) comprising a first probes group (5a) elastically contactable with a first pads group (11k) on the substrate (10) under a contact pressure in a predetermined range (2 z) within a first stroke change region (V1), a second probes group (5b) elastically contactable with a second pads group (11k) on the substrate (10) under a contact pressure in the predetermined range (2 z) within a second stroke change region (V2) different from the first stroke change region (V1), and a probe holder (3d) having the first and second probes groups (5a, 5b) set therein.</p> |
申请公布号 |
WO2004046739(A1) |
申请公布日期 |
2004.06.03 |
申请号 |
WO2003JP14717 |
申请日期 |
2003.11.19 |
申请人 |
NHK SPRING CO., LTD.;ISHIKAWA, SHIGEKI;WATANABE, MAKOTO |
发明人 |
ISHIKAWA, SHIGEKI;WATANABE, MAKOTO |
分类号 |
G01R1/073;(IPC1-7):G01R31/28 |
主分类号 |
G01R1/073 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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