摘要 |
An angle and length measurement circuit has photo diode or Hall effect detectors (310, 320, 330, 340) connected through a multiplexer (140) on a chip (100) with test connection pads (160) to a contact pad (260) and probe surface (261) on a second chip (200) on a separate substrate with analogue to digital converters (250) and a test signal source (150) connected to the amplifier (130, 135) inputs.
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