| 摘要 |
PROBLEM TO BE SOLVED: To easily strip a resist having a surface hardened layer in a short period of time without damaging other layers or producing dust. SOLUTION: The method for stripping a resist is carried out by irradiating the surface of a resist 3 with ultrashort pulse laser light 20 to strip at least a part of the surface hardened layer 9 by ablation or by converging ultrashort pulse laser light 20 onto above the surface hardened layer 9 to induce dielectric breakdown in the atmosphere to generate shock waves and to produces cracks 21 in the surface hardened layer 9 by the shock waves. The exposed resist 9 is stripped by ashing or with a resist stripping liquid in a supercritical fluid. COPYRIGHT: (C)2004,JPO |
