| 摘要 |
PROBLEM TO BE SOLVED: To provide a device manufacturing apparatus, such as an aligner or the like, which is restrained from increasing in size and effectively prevents an adverse effect caused by the heat released from the components. SOLUTION: Electric parts B3 and B4 are arranged inside a duct A13 where the temperature control gas is made to flow, and the cables extending from the electric parts B3 and B4 are connected to the other electric parts (e.g. sensors and motors) arranged outside the duct A13. COPYRIGHT: (C)2004,JPO
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