ELECTRON MICROSCOPE, OPERATING METHOD OF ELECTRON MICROSCOPE, OPERATING PROGRAM OF ELECTRON MICROSCOPE AND RECORD MEDIUM READABLE WITH COMPUTER

摘要

PROBLEM TO BE SOLVED: To provide an electron microscope or the like of which images of a sample observed at different magnifications can be easily brought into connection with each other, capable of putting a mark on the area to be marked. SOLUTION: The electron microscope is capable of storing a plurality of observation images as an image file, and displays an image observation area information W of a high magnification observation image A of a sample on a low magnification observation image 'a' of the same sample, and controlled so as to bring the low magnification observation image 'a' observing the sample at the low magnification, and the high magnification observation image A observed at a high magnification into connection with the image observation area information W of a high magnification observation image A in the low magnification observation image 'a'. COPYRIGHT: (C)2004,JPO