发明名称 Method for controlling electrical conductivity
摘要 A method for controlling electrical conductivity of a work piece by emitting pulse light from a light source onto the work piece, the method comprising a step of controlling the light emission index S of the pulse light in a 400<=S<=900 range, wherein light energy, pulse width and light emission index are represented by E J/cm<2>, tau sec, and S, and the S is defined as E/tau<1/2>.
申请公布号 US2004106243(A1) 申请公布日期 2004.06.03
申请号 US20030715446 申请日期 2003.11.19
申请人 KARASAWA TAKESHI;IKEUCHI MITURU 发明人 KARASAWA TAKESHI;IKEUCHI MITURU
分类号 H01L21/26;H01J37/317;H01L21/00;H01L21/336;H01L29/786;(IPC1-7):H01L29/76;H01L31/036;H01L21/477 主分类号 H01L21/26
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