发明名称 TEMPERATURE CONTROL DEVICE OF WORKING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide the temperature control device of a working device capable of lessening temperature changes of each mechanism without disposing a high-priced thermostatic chamber. SOLUTION: The temperature control device of the working device is provided with a temperature sensor which separately detects the temperatures of each mechanism comprising the working device, a hot air feeding means which separately feeds the hot air to disposition areas of each mechanism and a control means which controls the hot air feeding means in accordance with a detected temperature transmitted from a temperature sensor. The control means is provided with a memory means which stores set temperatures which are ordinary temperatures or higher each mechanism should keep, and if the detected temperature transmitted from the temperature sensor is lower than the set temperature stored in the memory means, the control means actuates the hot air feeding means to feed the hot air to the disposition areas of the predetermined mechanisms where the temperatures are lower than the set temperatures. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004154915(A) 申请公布日期 2004.06.03
申请号 JP20020325160 申请日期 2002.11.08
申请人 DISCO ABRASIVE SYST LTD 发明人 FUKUOKA TAKEOMI
分类号 B23Q11/14;H01L21/301;(IPC1-7):B23Q11/14 主分类号 B23Q11/14
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