| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for a high-temperature superconducting (HTS) layer in which an extremely high productivity can be achieved by using an XBa<SB>2</SB>Cu<SB>3</SB>O<SB>7</SB>functional layer 3 having a significantly faster deposition speed than a conventional technique. SOLUTION: This method for manufacturing a high temperature superconducting layer on a substrate 1a comprises depositing, on the substrate at a low growth rate, an RBa<SB>2</SB>Cu<SB>3</SB>O<SB>7</SB>layer 2 (wherein R is yttrium, a rare earth element with an atomic number of 57-71, or a mixture of two or more of these elements) and then depositing, on the layer 2 at a high growth rate, an XBa<SB>2</SB>Cu<SB>3</SB>O<SB>7</SB>layer 3 (wherein X is yttrium, a rare earth element with an atomic number of 57-71, or a mixture of two or more of these elements). The above low growth rate is preferably lower than 1nm/s; and the high growth rate, higher than 1nm/s. It is preferable to deposit the layer 2 on an at least biaxially oriented substrate 1a or on a substrate having at least biaxially oriented buffer layer. COPYRIGHT: (C)2004,JPO
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