Analytical process for measuring carbon concentrations comprises forming a coating on a sample using a sputtering ion stream, feeding secondary ions emitted from the sample to a detector, and analyzing

摘要

Analytical process comprises forming a coating (19) on a sample (1) using a sputtering ion stream consisting of sputtering ions (2) and an analysis ion stream (6) consisting of analysis ions (5), feeding secondary ions emitted from the sample to a detector (10) and analyzing. An Independent claim is also included for a device for carrying out the process.