| 发明名称 |
HERMETICALLY SEALED SILICON MICRO-MACHINED ELECTROMECHANICAL SYSTEM (MEMS) DEVICE HAVING DIFFUSED CONDUCTORS |
| 摘要 |
The present invention is an apparatus and method for a micro-machined electromechanical system (MEMS) device having a hermetically sealed sensor or actuator device mechanism that is electrically interconnected by diffused conductive paths to a plurality of wire bond pads that are located external to the hermetic seal. |
| 申请公布号 |
EP1423713(A1) |
申请公布日期 |
2004.06.02 |
| 申请号 |
EP20020759431 |
申请日期 |
2002.08.22 |
| 申请人 |
HONEYWELL INTERNATIONAL INC. |
发明人 |
SMITH, STEPHEN |
| 分类号 |
B81B7/00;G01P1/02;G01P15/08;(IPC1-7):G01P15/08 |
主分类号 |
B81B7/00 |
| 代理机构 |
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