| 摘要 |
A hydrostatic gas bearing having excellent damping characteristics. The hydrostatic gas bearing is of the orifice type having an air groove communicated with a gas injection port, wherein when a bearing clearance is denoted by h and a depth of the air groove by g, h is not larger than 5 µm and g/h is not smaller than 5. The material of the guide, slider and orifice constituting the bearing is alumina, silicon carbide, silicon nitride, Sialon, cordierite, or a composite ceramic comprising any one of them, as a main component. |
