| 摘要 |
PURPOSE: A constant temperature water circulation system of semiconductor device manufacturing equipment is provided to be capable of automatically controlling the flow rate of constant temperature water for conserving the temperature of the water and increasing the lifetime of a pump. CONSTITUTION: A constant temperature water circulation system(201) includes a constant temperature bath(102) connected to semiconductor device manufacturing equipment, a constant temperature water chamber supply tube(104), and a constant temperature water chamber exhaust tube(105) for conserving deionized water to a predetermined temperature by using cooling water and a heater. The constant temperature water circulation system further includes deionized water storing tank(108) connected to the bath and a deionized water supply tube, and a control part for securing a predetermined water level of the bath by controlling a constant temperature water exhaust solenoid valve(206) and a deionized water supply solenoid valve according to the result of a level detecting sensor. At this time, the level detecting sensor is installed in the bath.
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