Vaporizing device has a deviating unit formed as a nozzle tube (3) placed on a melt crucible (2) for deviating vapor flowing from the crucible. The nozzle tube has a vapor outlet (8) in its casing surface and a heater (10) which operates independently of the heater (11) of the crucible.
申请公布号
EP1424404(A2)
申请公布日期
2004.06.02
申请号
EP20030026360
申请日期
2003.11.18
申请人
APPLIED FILMS GMBH & CO. KG
发明人
HOFFMANN, UWE, DR.;JISCHKE, ANDREAS;KLOEPPEL, ANDREAS;SAUER, PETER
