| 摘要 |
PURPOSE: Laser repair equipment is provided to exactly check a malfunction part for minimizing damaged units by using a separation type LCA(Liquid Crystal Attenuation) module. CONSTITUTION: Laser repair equipment includes a laser rail apparatus. At this time, the laser rail apparatus includes a laser head for transforming the wavelength and pulse of the laser beam supplied from a power supply part, a manual attenuator for passively controlling the intensity of the laser beam, an LCA module(161) for automatically controlling the intensity of the laser beam of the laser head, and a VBE(Variable Beam Expander) module for controlling the spot of the laser beam supplied through the LCA module. The LCA module includes an LCA unit(162) for controlling the intensity of the laser beam and a shutter unit(164) for selectively breaking the laser beam. The LCA unit and the shutter unit are spaced apart from each other.
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