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发明名称
Integrated tunable Fabry-Pérot interferometer
摘要
申请公布号
EP0903565(B1)
申请公布日期
2004.06.02
申请号
EP19980402302
申请日期
1998.09.17
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE
发明人
JOURDAIN, ANNE;BIETH, CLAUDE
分类号
G01J3/26;G02B26/00;(IPC1-7):G01J3/26
主分类号
G01J3/26
代理机构
代理人
主权项
地址
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