发明名称 Method and system for manufacturing a photocathode
摘要 A system (10) for manufacturing a photocathode includes a support (12) and a polishing pad (14) disposed adjacent the support (12). The polishing pad (14) is operable to polish the photocathode in response to movable contact of the photocathode relative to the polishing pad (14). The system (10) also includes a rinsing system (16) coupled to the support (12). The rinsing system (16) is operable to deliver a rinsing agent to the polishing pad (14). The system (10) further includes a control system (62) operable to automatically regulate delivery of the rinsing agent to the rinsing system (16) at a predetermined time period.
申请公布号 US6743074(B1) 申请公布日期 2004.06.01
申请号 US20010957282 申请日期 2001.09.19
申请人 LITTON SYSTEMS, INC. 发明人 PRUET JAMES D.;COUCH DAVID G.
分类号 B08B3/02;B24B37/04;B24B53/007;(IPC1-7):B24B49/00 主分类号 B08B3/02
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