发明名称 Recipe comparison system
摘要 A recipe comparison system having recipe management ability in both offline accessing and online operating modes. The recipe comparison system includes an equipment server, an analysis module, and a recipe management module. The equipment server receives an upload signal, and then sends a recipe to the analysis module based on the upload signal. Then, the analysis module parses the recipe into internal-format-data according to a parsing rule, and outputs the internal-format-data to the recipe management module. If the recipe comparison system is in offline accessing mode, the recipe management module checks whether the internal-format-data obeys a specification definition. If the recipe comparison system is in the online operating mode, the recipe management module compares the internal-format-data with a standard recipe stored in a storage module.
申请公布号 US6745142(B2) 申请公布日期 2004.06.01
申请号 US20010910714 申请日期 2001.07.24
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 FU MING-RONG;LIN REX;OU NAI-TIEN;CHU CONSTANCE;SHIAU JIUN-SHIAN;HSU YING-WEI
分类号 G01N37/00;G06F17/22;G06F17/50;G06F19/00;(IPC1-7):G06F19/00 主分类号 G01N37/00
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