发明名称 Thin film using non-thermal techniques
摘要 A method for forming an integrated circuit is provided. A semiconductor film is formed onto a first substrate. A metal film is formed onto a second substrate. The second substrate is bonded with the metal film onto the thin film of the first substrate. A first layer of transistors is formed onto the film. The second substrate is removed at a temperature within a low temperature range. The semiconductor film is bonded with the first layer of transistors onto a second layer of transistors of a third substrate.
申请公布号 US6744116(B1) 申请公布日期 2004.06.01
申请号 US19990416501 申请日期 1999.10.08
申请人 INTEL CORPORATION 发明人 DOYLE BRIAN S.
分类号 H01L21/762;H01L21/84;(IPC1-7):H01L29/67 主分类号 H01L21/762
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