发明名称 Integrated ground shield
摘要 A ground shield for an integrated component device to prevent coupling between integrated capacitors and/or inductors and other integrated components. Components are formed upon a substrate. A conductive metal layer is formed or deposited thereon. The conductive metal layer is electrically connected to ground and an isolation layer is formed or deposited upon the conductive metal layer. An integrated capacitor, for example a MIM-type capacitor, is then formed upon the isolation layer. The grounded conductive metal layer absorbs electrical noise such that coupling between the capacitor and other components is prevented.
申请公布号 US6744129(B2) 申请公布日期 2004.06.01
申请号 US20020043911 申请日期 2002.01.11
申请人 MICROTUNE (SAN DIEGO), INC. 发明人 CHEW LEE;CHEAH JONATHON Y.
分类号 H01L27/08;(IPC1-7):H01L23/52;H01L23/34 主分类号 H01L27/08
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