| 摘要 |
Method and apparatus for marking microelectronic devices, such as bare microelectronic dies and packaged devices, to enhance the identification and automatic handling of wafers, dies and packaged devices. In one embodiment, a microelectronic device comprises a microelectronic die having an integrated circuit, a hidden marking layer superimposed relative to the die, and a cover layer over the hidden marking layer. The hidden marking layer can be applied to a surface of the die and/or a surface of a package encasing at least a portion of the die such that in either situation the hidden marking layer is superimposed relative to the die. In one embodiment, the hidden marking layer is a material that (a) can be removed by a scribing energy (e.g., incinerated or otherwise consumed), and/or (b) is at least partially opaque to an exposure energy. The hidden marking layer can also have a depression defining an identification mark through which at least a portion of the exposure energy can penetrate. The cover layer hides at least a portion of the marking layer over the depression. The cover layer can be a material that is (a) generally not removed or otherwise consumed by the scribing energy, and/or (b) at least partially transmissive to the exposure energy.
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