发明名称 Electrochemical machining method and apparatus
摘要 An electrochemical machining apparatus comprises a machining chamber for holding ultrapure water, a cathode/anode immersed in the ultrapure water held in the machining chamber, and a workpiece holding portion for holding a workpiece at a predetermined distance from the cathode/anode so that a surface, to be machined, of the workpiece is brought into contact with the ultrapure water. The electrochemical machining apparatus further comprises an anode/cathode contact brought into contact with the workpiece held by the workpiece holding portion so that the workpiece serves as an anode/cathode, a catalyst having a strongly basic anion exchange function or a strongly acidic cation exchange function, a power source for applying a voltage between the cathode/anode and the workpiece, and a moving mechanism for relatively moving the workpiece and the catalyst. The catalyst is disposed between the cathode/anode and the workpiece held by the workpiece holding portion.
申请公布号 US6743349(B2) 申请公布日期 2004.06.01
申请号 US20010897913 申请日期 2001.07.05
申请人 EBARA CORPORATION;MORI YUZO 发明人 MORI YUZO;SHIRAKASHI MITSUHIKO;TOMA YASUSHI;KOBATA ITSUKI;SAITO TAKAYUKI
分类号 B23H3/04;B01J47/12;B23H3/00;B23H3/08;C25D11/02;C25D11/06;C25D11/34;C25D17/00;C25F3/00;C25F7/00;(IPC1-7):C25F3/16 主分类号 B23H3/04
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