发明名称 Wafer indexing device
摘要 An indexing device including a housing, a cassette support mechanism, a cassette, and transport apparatus carried by the housing. The transport apparatus includes a bed of rollers having a common plane and a drive assembly coupled to the bed of rollers. The cassette support mechanism is mounted in the housing and movable along a pathway between a raised position and a lowered position relative the bed of rollers. The cassette is mounted on the cassette support mechanism.
申请公布号 US6742978(B1) 申请公布日期 2004.06.01
申请号 US20000732394 申请日期 2000.12.07
申请人 BTU INTERNATIONAL, INC. 发明人 MCKINLEY STEVE
分类号 H01L21/00;H01L21/677;(IPC1-7):B65B21/02;B65B69/00;B65G65/04;B65G49/07 主分类号 H01L21/00
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