发明名称 Composite metallic ultrafine particles and process for producing the same
摘要 The present invention relates to composite metallic ultrafine particles which have excellent dispersion stability and can be produced on an industrial scale, and a process for producing the same, and a method and an apparatus for forming an interconnection with use of the same. A surface of a core metal produced from a metallic salt, a metallic oxide, or a metallic hydroxide and having a particle diameter of 1 to 100 nm is covered with an organic compound including a functional group having chemisorption capability onto the surface of the core metal.
申请公布号 US6743395(B2) 申请公布日期 2004.06.01
申请号 US20010811581 申请日期 2001.03.20
申请人 EBARA CORPORATION 发明人 FUKUNAGA AKIRA;NAGASAWA HIROSHI;KAGOSHIMA KAORI;EMOTO MAKIKO
分类号 C23C26/00;B01J13/00;B22F1/00;B22F9/24;H01L21/00;H01L21/02;H01L21/288;H01L21/306;H01L21/321;H01L21/3213;H01L21/768;H05K3/10;(IPC1-7):C22C32/00;C09K3/00 主分类号 C23C26/00
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