发明名称 |
Internally marked quartz glass, quartz glass substrate for optical member, and marking method |
摘要 |
In a quartz glass, a mark is internally made such that a retardation generated in close proximity to the end of the mark is up to 20 nm. The internally marked quartz glass in which internal marks are created without sacrificing optical precision finds use as quartz glass substrates for optical members in the electronic industry.
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申请公布号 |
US6744458(B2) |
申请公布日期 |
2004.06.01 |
申请号 |
US20020242354 |
申请日期 |
2002.09.13 |
申请人 |
SHIN-ETSU CHEMICAL CO., LTD.;NAOETSU PRECISION CO., LTD. |
发明人 |
YAMADA MOTOYUKI;YAMAGA KOJI |
分类号 |
G02B1/00;B23K26/00;B41M5/26;C03B20/00;C03C23/00;H01S3/00;(IPC1-7):B41J2/435 |
主分类号 |
G02B1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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