发明名称 Method of fabricating semiconductor components
摘要 A plurality of semiconductor dice are provided on a substrate having a first side and a second side, with the semiconductor dice being spaced from one another by scribe line area. A stencil is positioned over at least one of the first side and the second side of the substrate. The stencil has masking sections which cover at least portions of the scribe line area. A polymer is applied through the positioned stencil onto the first or second side of the substrate over which the stencil is received, with the stencil substantially precluding the polymer from being applied on the covered portions of the scribe line area. After the applying, portions of the scribe line area are cut into and the plurality of dice are singulated from the substrate. Other aspects and implementations are contemplated.
申请公布号 US6743699(B1) 申请公布日期 2004.06.01
申请号 US20030349220 申请日期 2003.01.21
申请人 MICRON TECHNOLOGY, INC. 发明人 DOAN TRUNG TRI
分类号 H01L21/301;H01L21/56;H01L21/78;H01L23/31;(IPC1-7):H01L21/301 主分类号 H01L21/301
代理机构 代理人
主权项
地址