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发明名称
摘要
申请公布号
JP3533769(B2)
申请公布日期
2004.05.31
申请号
JP19950194419
申请日期
1995.07.31
申请人
发明人
分类号
H01L21/66;H01L21/336;H01L29/00;H01L29/78;(IPC1-7):H01L21/336
主分类号
H01L21/66
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