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发明名称
摘要
申请公布号
JP3531595(B2)
申请公布日期
2004.05.31
申请号
JP20000301526
申请日期
2000.09.29
申请人
发明人
分类号
C23C2/06;C23C2/16;C23C2/26;(IPC1-7):C23C2/06
主分类号
C23C2/06
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代理人
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