摘要 |
A SURFACE ACOUSTIC WAVE DEVICE (1) PROVIDED HAVING A SUBSTRATE (2) MADE OF QUARTZ, A PAIR OF INTER DIGITAL TRANSDUCER-SHAPE ELECTRODE (3) MADE OF AN ALUMINUM LAYER, AN ELECTRODE PAD (4), AND A PAIR OF LATTICE-SHAPED REFLECTORS (5) MADE OF THE SAME MATERIAL AS THE ELECTRODE (3). THE CRYSTAL STRUCTURE OF THE ALUMINUM LAYER COMPOSING THE ELECTRODE (3) IS A TWIN CRYSTAL STRUCTURE, WHERE CRYSTAL GRAINS OF THE (-1 1 1) PLANE AND THE (0 0 2) PLANE AND CRYSTAL GRAINS OF THE (1 -1 -1) PLANE AND THE (0 0 -2) PLANE ARE IN A TWIN CRYSTAL RELATIONSHIP WITH THE (-1 1 -1) PLANE AND THE (1 -1 1) PLANE OF ALUMINUM AS THE TWIN BOUNDARIES. ALSO, THE (1 1 1) PLANE OF THE ALUMINUM LAYER IS ORIENTED TO AN 8° INCLINATION RELATIVE TO THE (0 1 0) PLANE OF QUARTZ COMPOSING THE SUBSTRATE.
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