| 摘要 |
PURPOSE: To provide a fluorine gas generator in which even on the occasion of emergency stop of the fluorine generator or on the occasion of suspension of HF supply, the electrolytic bath does not enter the upstream line to clog the line inside by solidification or HF does not remain in the line inside. CONSTITUTION: In a fluorine gas generator for generating fluorine gas by electrolyzing an electrolytic bath(2) comprising a hydrogen fluoride-containing mixed molten salt, the generator comprises a hydrogen fluoride gas feed line(24) for feeding hydrogen fluoride gas into the electrolytic bath; a first automatic valve(81) disposed on the hydrogen fluoride gas feed line and capable of being closed on the occasion of interruption of hydrogen fluoride gas feeding; and an inert gas substitution means for eliminating the hydrogen fluoride gas remaining in the line on the side downstream from the first automatic valve on the hydrogen fluoride gas feed line and substituting an inert gas therefor on the occasion of interruption of hydrogen fluoride gas feeding, wherein the inert gas substitution means comprises a detecting means for detecting interruption of feeding of the hydrogen fluoride gas; an inert gas feed line(91) for feeding the inert gas to the hydrogen fluoride gas feed line on the side downstream from the first automatic valve; and a second automatic valve(73) disposed on the inert gas feed line and operated in association with the detecting means to feed the inert gas into the line on the side downstream from the first automatic valve on the hydrogen fluoride gas feed line, wherein the inert gas feed line is provided with an inert gas storage tank(92) for storing the inert gas to be fed.
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