| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for purifying pentafluoroethane, by which the highly pure pentafluoroethane capable of being used as a low temperature refrigerant or an etching gas can profitably be obtained. SOLUTION: The method for purifying the pentafluoroethane is characterized by bringing the crude pentafluoroethane containing at least one compound selected from the group consisting of hydrofluorocarbons each containing one carbon atom in the molecule, hydrochorofluorocarbons each containing one carbon atom in the molecule, and hydrochlorocarbons each containing one carbon atom in the molecule into contact with an adsorbent comprising zeolite having a silica/aluminum ratio of ≤2.0 and/or a carbonaceous adsorbent having an average fine pore diameter of 3.5 to 6Å to reduce the content of the compound. COPYRIGHT: (C)2004,JPO |
