| 摘要 |
PROBLEM TO BE SOLVED: To provide a positioning table equipped with a compact, highly precise and highly rigid mechanism for smoothly executing the movement and turn of a positioning table supported so as to be freely movable and turnable in X axial, Y axial andθaxial directions. SOLUTION: This positioning table is provided with a plurality of first rollers 19a to 19c supported so as to be rotatable at one edge of each of driving shafts 17a to 17c, and arranged so as to be brought into contact with an upper table 13, a plurality of second rollers 23a to 23c supported rotatably at the other edge of each of the driving shafts 17a to 17c, a plurality of wedge blocks 22a to 22c having wedge faces butted to the second rollers 23a to 23c and a plurality of compressing springs 44a to 44c arranged so as to be faced to the respective driving shafts 17a to 17c with the upper table 13 interposed, and supported movably at an angle perpendicular to the compressing directions. COPYRIGHT: (C)2004,JPO
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